Comparison of measured and calculated values for the diffraction line profiles and integral reflection coefficients for multiple diffraction orders of multilayer structures

Philip G. Burkhalter; John V. Gilfrich; R. K. Freitag; Herbert B. Rosenstock; Dennis B. Brown

doi:10.1117/12.51213

1 January 1992 Comparison of measured and calculated values for the diffraction line profiles and integral reflection coefficients for multiple diffraction orders of multilayer structures

Philip G. Burkhalter, John V. Gilfrich, R. K. Freitag, Herbert B. Rosenstock, Dennis B. Brown

Author Affiliations +

Proceedings Volume 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics; (1992) https://doi.org/10.1117/12.51213
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Double-crystal and single-crystal spectrometer measurements of line profile and integral reflection coefficient versus diffraction order are presented. These results are compared with theoretical predictions. The ability of the use of an intermediate layer in the theoretical model to explain the results is emphasized.

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Philip G. Burkhalter, John V. Gilfrich, R. K. Freitag, Herbert B. Rosenstock, and Dennis B. Brown "Comparison of measured and calculated values for the diffraction line profiles and integral reflection coefficients for multiple diffraction orders of multilayer structures", Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); https://doi.org/10.1117/12.51213

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