Soft X-UV silver silicon multilayer mirrors

Jian-Da Shao; Zhengxiu Fan; Yong Hong Guo; Lei Jin

doi:10.1117/12.47258

1 November 1991 Soft X-UV silver silicon multilayer mirrors

Jian-Da Shao, Zhengxiu Fan, Yong Hong Guo, Lei Jin

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47258
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

In the soft x-ray domain (near 10 nm), the reported optical constants of silver and silicon are sufficiently different to make them attractive for a multilayer design. In this paper, design and fabrication of silver/silicon multilayer to be used as normal-incidence reflectors for 11.4 nm radiation are presented. Characterization of these multilayer structures was accomplished using Auger electron spectroscopy (AES) and little-angle x-ray diffraction (LXD). As a result of our experiments, we came to realize that silver/silicon multilayer can provide high quality structures and reach a certain reflectance.

Citation Download Citation

Jian-Da Shao, Zhengxiu Fan, Yong Hong Guo, and Lei Jin "Soft X-UV silver silicon multilayer mirrors", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47258

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KEYWORDS

Multilayers

Silicon

Silver

Mirrors

Reflectivity

Interfaces

Sputter deposition

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