Photoacoustic microscopy by photodeformation applied to the determination of thermal diffusivity

Daniel L. Balageas; Daniel M. Boscher; Alain A. Deom; Francis Enguehard; Laurence Noirot

doi:10.1117/12.46442

1 March 1991 Photoacoustic microscopy by photodeformation applied to the determination of thermal diffusivity

Daniel L. Balageas, Daniel M. Boscher, Alain A. Deom, Francis Enguehard, Laurence Noirot

Proceedings Volume 1467, Thermosense XIII; (1991) https://doi.org/10.1117/12.46442
Event: Orlando '91, 1991, Orlando, FL, United States

Abstract

Photoacoustic microscopy by photodeformation can be used to generate imagery on a micrometric scale. It may be used for nondestructive testing, especially in the microelectronics industry. A quantitative application of this method is presented here, for making relative measurements of thermal diffusivity of samples of a few tens of cubic micrometers in volume. The measurement is relative because it requires a reference sample of known diffusivity. Possible applications are thin films, very small homogeneous samples exhibiting high gradients of thermal properties, thin coatings, etc. Some results are presented for bulk materials and diamond-like carbon thin coatings.

Citation Download Citation

Daniel L. Balageas, Daniel M. Boscher, Alain A. Deom, Francis Enguehard, and Laurence Noirot "Photoacoustic microscopy by photodeformation applied to the determination of thermal diffusivity", Proc. SPIE 1467, Thermosense XIII, (1 March 1991); https://doi.org/10.1117/12.46442

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