Interferometer accuracy and precision

Lars A. Selberg

doi:10.1117/12.26110

1 March 1991 Interferometer accuracy and precision

Lars A. Selberg

Proceedings Volume 1400, Optical Fabrication and Testing; (1991) https://doi.org/10.1117/12.26110
Event: Singapore, 1990, -, Singapore

Abstract

Several optical errors present in interferometer systems are examined in detail. Optical cavity errors are typically the primary limitation on measurement accuracy. Secondary sources of error include imaging distortion and ray-mapping (slope) errors. The effect of phase modulation/processing errors on precision is briefly discussed. Some on- site errors (operator technique and environmental effects) are also examined. Rules of thumb for error estimation are presented when applicable. Specific quantitative analysis is based on the Zygo MARK IVxp phase measuring interferometer.

Citation Download Citation

Lars A. Selberg "Interferometer accuracy and precision", Proc. SPIE 1400, Optical Fabrication and Testing, (1 March 1991); https://doi.org/10.1117/12.26110

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available