Lithography vacuum and exhaust gas management for EUV high NA

Zhen Ma; Richard Salloum; Jingyuan Zhang; Bin Zhao

doi:10.1117/12.3053555

10 December 2024 Lithography vacuum and exhaust gas management for EUV high NA

Zhen Ma, Richard Salloum, Jingyuan Zhang, Bin Zhao

Author Affiliations +

Proceedings Volume 13423, Eighth International Workshop on Advanced Patterning Solutions (IWAPS 2024); 134231G (2024) https://doi.org/10.1117/12.3053555
Event: 8th International Workshop on Advanced Patterning Solutions (IWAPS 2024), 2024, Jiaxing, Zhejiang, China

Abstract

The latest generation of EUV lithography has launched in the market; the higher numeric aperture and more powerful light source bring additional challenges for vacuum and exhaust gas management providers. From an environmental view, EUV owners expect the vacuum subsystem to perform a better carbon footprint than the last generation of the EUV system. This paper will discuss dealing with a higher flow rate of clean hydrogen gas and reducing utility usage simultaneously. The field running result and future improvement plan will be shared. Furthermore, some hydrogen can be reused through an exhaust management system, thus reducing hydrogen consumption by up to 80%.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Zhen Ma, Richard Salloum, Jingyuan Zhang, and Bin Zhao "Lithography vacuum and exhaust gas management for EUV high NA", Proc. SPIE 13423, Eighth International Workshop on Advanced Patterning Solutions (IWAPS 2024), 134231G (10 December 2024); https://doi.org/10.1117/12.3053555

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE