Application of anlogic infotech EG4D20 FPGA in wafer and chip defect observation

Yaqian Deng; Siyu Zheng; Yunzhou Qiu; Gentuan Jia; Cheng Liu

doi:10.1117/12.3035739

16 August 2024 Application of anlogic infotech EG4D20 FPGA in wafer and chip defect observation

Yaqian Deng, Siyu Zheng, Yunzhou Qiu, Gentuan Jia, Cheng Liu

Proceedings Volume 13230, Third International Conference on Machine Vision, Automatic Identification, and Detection (MVAID 2024); 132301D (2024) https://doi.org/10.1117/12.3035739
Event: Third International Conference on Machine Vision, Automatic Identification and Detection, 2024, Kunming, China

Abstract

This paper explores the feasibility and challenge of applying FPGA technology, specifically Anlogic Infotech EG4D20 FPGA, in wafer and chip defect detection. A preliminary FPGA-based chip defect observation system is constructed, enabling real-time monitoring of surface features on silicon wafers. This system rapidly displays existing defects on the silicon surface, meets the real-time image acquisition requirements of chip observation systems, and exhibits high reliability. Based on this research direction, a design scheme is proposed for an FPGA chip defect detection system equipped with the Yolov5 algorithm model. This scheme provides a new research approach for chip defect detection technology and highlights the immense potential of FPGA in this field.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yaqian Deng, Siyu Zheng, Yunzhou Qiu, Gentuan Jia, and Cheng Liu "Application of anlogic infotech EG4D20 FPGA in wafer and chip defect observation", Proc. SPIE 13230, Third International Conference on Machine Vision, Automatic Identification, and Detection (MVAID 2024), 132301D (16 August 2024); https://doi.org/10.1117/12.3035739

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