Testing optical surface form by a precise point diffraction interferometer D7

Nikolay Voznesenskiy; Mariia Voznesenskaia

doi:10.1117/12.3031785

30 July 2024 Testing optical surface form by a precise point diffraction interferometer D7

Nikolay Voznesenskiy, Mariia Voznesenskaia

Proceedings Volume 13221, Eleventh European Seminar on Precision Optics Manufacturing; 132210G (2024) https://doi.org/10.1117/12.3031785
Event: Eleventh European Seminar on Precision Optics Manufacturing (POM24), 2024, Teisnach, Germany

Abstract

In the paper methods and results of testing optical surface form with the use of the point diffraction interferometer (PDI) D7 are presented. This interferometer can produce much higher accuracy of testing optics of various kinds than traditional interferometers, and validation of its industrial applicability is the scope of the paper. An overview and analysis of techniques making using D7 in manufacturing process easier and faster are given, the accuracy which can be achieved with common requirements of optical industry is evaluated at level of λ/150 – λ/250 PV and λ/600 – λ/1000 RMS. Measurements by subapertures for consequent stitching of subaperture wavefronts with desired overlay are considered. Conclusions followed by further perspectives of the described instrument are given.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Nikolay Voznesenskiy and Mariia Voznesenskaia "Testing optical surface form by a precise point diffraction interferometer D7", Proc. SPIE 13221, Eleventh European Seminar on Precision Optics Manufacturing, 132210G (30 July 2024); https://doi.org/10.1117/12.3031785

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