Improving process window and resolution through source polarization in High-NA EUV

Yu-Jin Chae; Min-Woo Kim; Da-Kyung Yu; Seung-woo Son; Michael Yeung; Hye-Keun Oh

doi:10.1117/12.3037370

20 November 2024 Improving process window and resolution through source polarization in High-NA EUV

Yu-Jin Chae, Min-Woo Kim, Da-Kyung Yu, Seung-woo Son, Michael Yeung, Hye-Keun Oh

Proceedings Volume 13216, Photomask Technology 2024; 132162M (2024) https://doi.org/10.1117/12.3037370
Event: SPIE Photomask Technology + EUV Lithography, 2024, Monterey, California, United States

Conference Poster

Abstract

The effect of polarized illumination in enhancing pattern fidelity and resolution in high NA EUV is examined. The influence of polarization on two key performance metrics: NILS and nDOF is systematically analyzed. As is known, polarized illumination significantly improves both metrics, leading to better resolution and the process window overall imaging performance in high NA EUV, where maintaining high resolution and image quality is particularly challenging. Integrating polarization into source optimization proves to be highly effective, expanding the process window. The importance of polarized illumination is highlighted in overcoming the resolution limits of high NA EUV lithography, making it a key enabler for future advancements in semiconductor manufacturing.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yu-Jin Chae, Min-Woo Kim, Da-Kyung Yu, Seung-woo Son, Michael Yeung, and Hye-Keun Oh "Improving process window and resolution through source polarization in High-NA EUV", Proc. SPIE 13216, Photomask Technology 2024, 132162M (20 November 2024); https://doi.org/10.1117/12.3037370

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available