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6 September 2024 Optimization of SI3N4 nanophotonic resonator taking into account the substrate influence
A. I. Garifullin, N. M. Arslanov
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Proceedings Volume 13168, Optical Technologies for Telecommunications 2023; 131681J (2024) https://doi.org/10.1117/12.3026578
Event: Optical Technologies for Telecommunications 2023, 2023, Kazan, Russian Federation
Abstract
A nanophotonic resonator with high Q-factor and low mode volume is a promising system for creating optoelectronic devices on a chip and enhancing the light-matter interaction. In this work, the parameters of a silicon nitride nanophotonic resonator have been optimized to generate high-quality resonant states. The calculations were carried out using a deterministic method of achieving high Q-factor values.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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A. I. Garifullin and N. M. Arslanov "Optimization of SI3N4 nanophotonic resonator taking into account the substrate influence", Proc. SPIE 13168, Optical Technologies for Telecommunications 2023, 131681J (6 September 2024); https://doi.org/10.1117/12.3026578
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KEYWORDS
Resonators
Waveguides
Nanophotonics
Optical resonators
Quantum nanophotonics
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