Development of micro/nano-tomography system at SPring-8 BL47XU

Kentaro Uesugi; Masahiro Yasutake; Akihisa Takeuchi

doi:10.1117/12.3027966

16 October 2024 Development of micro/nano-tomography system at SPring-8 BL47XU

Kentaro Uesugi, Masahiro Yasutake, Akihisa Takeuchi

Proceedings Volume 13152, Developments in X-Ray Tomography XV; 131520G (2024) https://doi.org/10.1117/12.3027966
Event: Optical Engineering + Applications, 2024, San Diego, California, United States

Abstract

X-ray micro/nano-tomography (multiscale CT) has been developed at SPring-8 BL47XU. The x-ray optics consists of a simple projection type imaging system for micro-tomography and a full-field x-ray microscope using a Fresnel zone plate (FZP) for nano-tomography, respectively. All components are mounted on high precision stages driven by stepper motor. It takes two or three minutes to change the mode from “micro” to “nano” or “nano” to “micro”. The spatial resolutions are 1μm and 100nm for micro and nano tomography. The width of the field of views are 800μm and 60μm. The measurement time is about 2 minutes for 1800 projections in nano-mode. The sample stages also have a possibility to switch to the setup of laminography measurement mode. The energy range is between 7keV and 15keV for multiscale CT.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Kentaro Uesugi, Masahiro Yasutake, and Akihisa Takeuchi "Development of micro/nano-tomography system at SPring-8 BL47XU", Proc. SPIE 13152, Developments in X-Ray Tomography XV, 131520G (16 October 2024); https://doi.org/10.1117/12.3027966

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