Review of Schottky-barrier imager technology

Walter F. Kosonocky

doi:10.1117/12.21713

1 September 1990 Review of Schottky-barrier imager technology

Walter F. Kosonocky

Proceedings Volume 1308, Infrared Detectors and Focal Plane Arrays; (1990) https://doi.org/10.1117/12.21713
Event: 1990 Technical Symposium on Optics, Electro-Optics, and Sensors, 1990, Orlando, FL, United States

Abstract

Advances in the development of infrared image sensors with Schottky-barrier detectors (SBDs) are reviewed. SBD operation and design structure are described, including the responsivity and dark-current characteristics and SBD fabrication. The reported results for a variety of focal plane arrays (FPAs) are compared in terms of parameters such as pixel size, fill factor, and SBD type. The development of scanning PtSi FPAs with 4096 by 4 elements and 2048 by 16 TDI elements is reported for spaceborne remote sensing applications. Up to 512 by 512 elements and 640 by 486 elements have reportedly been developed for high-resolution staring PtSi FPAs. Useful thermal imaging is shown for some staring FPAs, and IrSi SBDs with cut-off wavelengths up to 10 microns is shown for some FPAs in the LWIR band. Because the silicon VLSI process is exclusively employed to produce Schottky-barrier FPAs, these FPAs are found to be useful for uniform, low-cost SWIR and MWIR applications.

Citation Download Citation

Walter F. Kosonocky "Review of Schottky-barrier imager technology", Proc. SPIE 1308, Infrared Detectors and Focal Plane Arrays, (1 September 1990); https://doi.org/10.1117/12.21713

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