Ultimate measurement speed for flexible asphere and freeform metrology: TWISS

Christian Schober; Christof Pruß; Alois Herkommer; Stephan Reichelt

doi:10.1117/12.3025161

17 June 2024 Ultimate measurement speed for flexible asphere and freeform metrology: TWISS

Christian Schober, Christof Pruß, Alois Herkommer, Stephan Reichelt

Proceedings Volume 13024, Optical Instrument Science, Technology, and Applications III; 1302402 (2024) https://doi.org/10.1117/12.3025161
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

Asphere and freeform metrology forms the basis of precision optics fabrication. Stitching or scanning methods provide the necessary flexibility, but require measurement times of several minutes. Using parallel information channels of light (wavelength, polarization, phase) in combination with the model-based tilted wave interferometry approach boosts the measurement possibilities. In this proceeding we show how these information channels can be used to enhance the measurement capabilities regarding reconstruction quality and show how the complete shape information of strong aspheres can be recorded by TWISS (tilted wave interferometry single-shot) within milliseconds.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Christian Schober, Christof Pruß, Alois Herkommer, and Stephan Reichelt "Ultimate measurement speed for flexible asphere and freeform metrology: TWISS", Proc. SPIE 13024, Optical Instrument Science, Technology, and Applications III, 1302402 (17 June 2024); https://doi.org/10.1117/12.3025161

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