QUASI: a qualitative analysis of surface and interface program for microelectronic materials processing

Su-Shing Chen

doi:10.1117/12.21149

1 January 1990 QUASI: a qualitative analysis of surface and interface program for microelectronic materials processing

Su-Shing Chen

Author Affiliations +

Proceedings Volume 1293, Applications of Artificial Intelligence VIII; (1990) https://doi.org/10.1117/12.21149
Event: 1990 Technical Symposium on Optics, Electro-Optics, and Sensors, 1990, Orlando, FL, United States

Abstract

Qualitative simulation is a technique of artificial intelligence for the qualitative description of mechanism and the representation of incomplete knowledge of the structure and behavior in qualitative physics. Although quantitative simulation has been the main analytical tool in microelectronic materials processing, it is not adequate for real-time process/equipment monitoring and control. Qualitative simulation and modeling can be directly used in process monitoring/control expert systems and any part of CAD/CAE/CAT automation. The qualitative structure and behavior descriptions can be encoded directly as expert knowledge, and moreover used for model-based reasoning.

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Su-Shing Chen "QUASI: a qualitative analysis of surface and interface program for microelectronic materials processing", Proc. SPIE 1293, Applications of Artificial Intelligence VIII, (1 January 1990); https://doi.org/10.1117/12.21149

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