11th annual eBeam initiative survey reports EUV fueling photomask growth

Aki Fujimura; Jan Willis

doi:10.1117/12.2683454

29 September 2023 11th annual eBeam initiative survey reports EUV fueling photomask growth

Aki Fujimura, Jan Willis

Proceedings Volume 12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology; 129150E (2023) https://doi.org/10.1117/12.2683454
Event: Photomask Japan 2023, 2023, Online Only

Abstract

The eBeam Initiative completed its 11th annual opinion survey in July 2022 with anonymous feedback from industry luminaries representing 44 companies from across the semiconductor ecosystem – including photomasks, electronic design automation (EDA), chip design, equipment, materials, manufacturing and research. Started in 2012, the Luminaries Survey is used each year to gather predictions of industry trends. 2022 survey results reflect that EUV is fueling the photomask industry as 78 percent of survey respondents believe that EUV lithography will contribute to photomask (mask) revenue growth. EUV remains the top reason cited by survey respondents for purchasing multi-beam mask writers. Access to multi-beam mask writers is seen as less of a barrier to curvilinear mask making compared to the 2021 survey. Confidence among luminaries in curvilinear mask making remains high, with 76 percent of respondents indicating that leading-edge mask shops can handle at least a limited number of such masks. With EUV providing the fuel, optimism for overall photomask market growth continued in 2022 with 70 percent of survey respondents predicting that mask revenues in 2022 will increase compared to 2021 revenues.

Citation Download Citation

Aki Fujimura and Jan Willis "11th annual eBeam initiative survey reports EUV fueling photomask growth", Proc. SPIE 12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology, 129150E (29 September 2023); https://doi.org/10.1117/12.2683454

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KEYWORDS

Extreme ultraviolet

High volume manufacturing

Photomasks

Inspection

Pellicles

Deep learning

Industry

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