A 3D-printed bistable electromagnetic microlens actuator

Aybuke Calikoglu; Hans Zappe; Çaǧlar Ataman

doi:10.1117/12.2692667

13 March 2024 A 3D-printed bistable electromagnetic microlens actuator

Aybuke Calikoglu, Hans Zappe, Çaǧlar Ataman

Proceedings Volume 12898, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII; 128980C (2024) https://doi.org/10.1117/12.2692667
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

We present a monolithically 3D nanoprinted micro-optomechanical switch with electromagnetic actuation. The bistable actuator moves a microlens between two distinct positions along the optical axis, thereby shifting the image plane and attaining different numerical apertures. The sub-millimeter-size device achieves an average displacement of 163.9 µm between the two stable positions, with positioning and orientation errors below 3 µm and 0.5 degrees, respectively. An electromagnetic actuation system consisting of a polymer magnet and an external coil allows for rapid switching. We characterized the resonance behavior of the microlens actuator and demonstrated its capability for both DC and AC driving between stable positions.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Aybuke Calikoglu, Hans Zappe, and Çaǧlar Ataman "A 3D-printed bistable electromagnetic microlens actuator", Proc. SPIE 12898, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII, 128980C (13 March 2024); https://doi.org/10.1117/12.2692667

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