Quality factor enhancement of InP nanobeam cavities using atomic layer deposition

Mohammad Habibur Rahaman; Chang-Min Lee; Mustafa Atabey Buyukkaya; Samuel Harper; Fariba Islam; Edo Waks

doi:10.1117/12.3000597

13 March 2024 Quality factor enhancement of InP nanobeam cavities using atomic layer deposition

Mohammad Habibur Rahaman, Chang-Min Lee, Mustafa Atabey Buyukkaya, Samuel Harper, Fariba Islam, Edo Waks

Author Affiliations +

Proceedings Volume 12896, Photonic and Phononic Properties of Engineered Nanostructures XIV; 128960D (2024) https://doi.org/10.1117/12.3000597
Event: SPIE OPTO, 2024, San Francisco, California, United States

Conference Poster

Abstract

In this study, we demonstrate the improvement of quality factors in InP nanobeam cavities using atomic layer deposition (ALD). By depositing a small amount of Al₂O₃ thin films on the cavities, we achieve up to 140% enhancement in quality factors. This advancement in cavity quality factors holds promise for optimizing InP nanobeam cavities when incorporating active materials like quantum dots and quantum wells, enabling widespread utilization across diverse photonic applications.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Mohammad Habibur Rahaman, Chang-Min Lee, Mustafa Atabey Buyukkaya, Samuel Harper, Fariba Islam, and Edo Waks "Quality factor enhancement of InP nanobeam cavities using atomic layer deposition", Proc. SPIE 12896, Photonic and Phononic Properties of Engineered Nanostructures XIV, 128960D (13 March 2024); https://doi.org/10.1117/12.3000597

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