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5 October 2023 Consistency of low reflective coatings and CD controls
Valdis Sneberg
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Proceedings Volume 12805, Bay Area Chrome Users Society Symposium 1981; 1280508 (2023) https://doi.org/10.1117/12.3009936
Event: First Annual BACUS Symposium, 1981, Sunnyvale, CA, United States
Abstract
Consistency of low reflective coatings and CD controls
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Valdis Sneberg "Consistency of low reflective coatings and CD controls", Proc. SPIE 12805, Bay Area Chrome Users Society Symposium 1981, 1280508 (5 October 2023); https://doi.org/10.1117/12.3009936
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KEYWORDS
Critical dimension metrology
Photoresist materials
Control systems
Fourier transforms
Coating thickness
Gold
Printing
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