Swing-arm profilometer design for high steepness optical aspheric surfaces

Mingjie Peng; Tao Ma

doi:10.1117/12.2688751

27 November 2023 Swing-arm profilometer design for high steepness optical aspheric surfaces

Mingjie Peng, Tao Ma

Proceedings Volume 12769, Optical Metrology and Inspection for Industrial Applications X; 127691F (2023) https://doi.org/10.1117/12.2688751
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Conference Poster

Abstract

Aiming at the problem that high steepness aspheric optical components lack a versatile and efficient surface shape detection method in the grinding and rough polishing stages, swing-arm profilometer suitable for high steepness aspheric surface shape detection is proposed. The system can perform both high and low steepness aspheric specular inspections. We established the mathematical measurement model of the swing-arm profilometer, carried out the mechanical structure design, built the swing-arm profilometer prototype, and designed the error compensation algorithm. The system has the advantages of easy adjustment and high measurement efficiency. The swing-arm profilometer prototype is used to measure the standard spherical mirror and ellipsoidal mirror, and the measurement results show that the measuring device has good detection accuracy and repeatability, which can effectively improve the measurement and processing efficiency of aspheric optical components.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Mingjie Peng and Tao Ma "Swing-arm profilometer design for high steepness optical aspheric surfaces", Proc. SPIE 12769, Optical Metrology and Inspection for Industrial Applications X, 127691F (27 November 2023); https://doi.org/10.1117/12.2688751

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