Full-field modeling and calibration of 3D interference fringe volume with line-shaped Gaussian beam intersection

Hao Zhang; Jieping Wang; Shiji Wang

doi:10.1117/12.2683552

27 November 2023 Full-field modeling and calibration of 3D interference fringe volume with line-shaped Gaussian beam intersection

Hao Zhang, Jieping Wang, Shiji Wang

Author Affiliations +

Proceedings Volume 12769, Optical Metrology and Inspection for Industrial Applications X; 127690F (2023) https://doi.org/10.1117/12.2683552
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

Line-shaped beam based Doppler distance sensors enable 3D inspection of rotating rough surfaces for instance in working lathes by a simultaneous, multipoint velocity and distance measurement. To minimize the systematic error of the measurement, this work presents a high-accuracy 3D model and calibration of the interferometric fringe volume of the sensors. The model is derived from the Gaussian beam expression and applied to describe fringe geometry distribution throughout the intersection volume of two paraxial Gaussian beams. A full-field fringe spacing calibration using a high-resolution matrix camera is performed with two line-shaped beams as a demonstration, which shows an average relative difference of below 0.6% to the modeling result.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Hao Zhang, Jieping Wang, and Shiji Wang "Full-field modeling and calibration of 3D interference fringe volume with line-shaped Gaussian beam intersection", Proc. SPIE 12769, Optical Metrology and Inspection for Industrial Applications X, 127690F (27 November 2023); https://doi.org/10.1117/12.2683552

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