Stimulated Brillouin scattering at 248 nm for application to lensless imaging

Anton K. Pfau; Detlev Proch; Friedrich G. Bachmann

doi:10.1117/12.20402

1 August 1990 Stimulated Brillouin scattering at 248 nm for application to lensless imaging

Anton K. Pfau, Detlev Proch, Friedrich G. Bachmann

Proceedings Volume 1271, Adaptive Optics and Optical Structures; (1990) https://doi.org/10.1117/12.20402
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

This contribution describes the results of an investigative study of the use of a commercial narrow band excimer laser in photolithography. The technique for image projection involves the use of phase conjugate mirrors which we produced by stimulated Brillouin scattering . Feature sizes down to 80 m could be projected. Attempts to transfer smaller structures failed since diffraction effects led to an inflation of the focal volume, which eventually reduced the power density below the threshold for stimulated Brillouin scattering. As will be shown the properties of the commercial light source represent the major obstacle towards a substantial improvement in the imaging performance.

Citation Download Citation

Anton K. Pfau, Detlev Proch, and Friedrich G. Bachmann "Stimulated Brillouin scattering at 248 nm for application to lensless imaging", Proc. SPIE 1271, Adaptive Optics and Optical Structures, (1 August 1990); https://doi.org/10.1117/12.20402

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