Development of an inner surface profile measurement system for precise electroformed Wolter mirrors for x-ray telescopes

Shunsuke Ito; Akinari Ito; Shutaro Mohri; Gota Yamaguchi; Hidekazu Mimura

doi:10.1117/12.2675892

3 October 2023 Development of an inner surface profile measurement system for precise electroformed Wolter mirrors for x-ray telescopes

Shunsuke Ito, Akinari Ito, Shutaro Mohri, Gota Yamaguchi, Hidekazu Mimura

Author Affiliations +

Proceedings Volume 12695, Advances in Metrology for X-Ray and EUV Optics X; 1269503 (2023) https://doi.org/10.1117/12.2675892
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

Wolter mirrors for x-ray telescopes is fabricated through nickel electroforming process. Although the sufficient imaging ability has been confirmed through both x-ray focusing experiments and ray-trace analysis, there are still surface figure errors that need to be removed to improve the resolving power. We propose a new figure correction method combining Si coating on the mirror surface and Si removal processing. To implement this method, we have developed an inner surface profile measurement system. This system involves three non-contact laser probes that are scanned by a motorized stage. Two of the probes are used for compensating motion errors of the scanning stage. This method enables us to measure a one-dimensional figure error profile of the Wolter mirrors with a reproducibility on the order of single nanometers.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Shunsuke Ito, Akinari Ito, Shutaro Mohri, Gota Yamaguchi, and Hidekazu Mimura "Development of an inner surface profile measurement system for precise electroformed Wolter mirrors for x-ray telescopes", Proc. SPIE 12695, Advances in Metrology for X-Ray and EUV Optics X, 1269503 (3 October 2023); https://doi.org/10.1117/12.2675892

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