Full-aperture wavefront reconstruction method in quadri-wave lateral shearing interferometry (QWLSI)

In-Ung Song; Ho-Soon Yang; Yun-Woo Lee

doi:10.1117/12.2677170

4 October 2023 Full-aperture wavefront reconstruction method in quadri-wave lateral shearing interferometry (QWLSI)

In-Ung Song, Ho-Soon Yang, Yun-Woo Lee

Proceedings Volume 12672, Applied Optical Metrology V; 126720E (2023) https://doi.org/10.1117/12.2677170
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

This study presents a method for reconstructing the full-aperture wavefront, particularly at the edge-side wavefront in Quadri-Wave Lateral Shearing Interferometry (QWLSI). While QWLSI is a powerful method for measuring wavefront error in an optical system, it faces the challenge of obtaining wavefront information on the non-interfering region on the edge side of the input beam by lateral shearing. This challenge becomes more significant for larger apertures. To address this, the study proposes a modified method for reconstructing the full-aperture wavefront using the basic principle of partial slope detection in lateral shearing interferometry (LSI). QWLSI provides four directional two-point slope functions by wavefront shearing. The inverse LSI slope can be deduced using the spatial relation between the reconstructed center wavefront and the measured slope information. The partial edge-side wavefront can then be reconstructed using this inverse equation, following the four-shearing direction. Finally, the partial edge-side wavefront maps can be combined using a phase stitching algorithm to obtain a full-aperture wavefront. The effectiveness of this method was demonstrated through numerical simulation and experimental results, which showed that the proposed method accurately reconstructed the noninterfering edge-side wavefront in QWLSI, improving the spatial range of wavefront measurement. This technique has potential applications in optical testing, particularly in improving the efficiency of large aperture mirror testing by reducing the margin diameter of the mirror blank preparation. The study introduces the reconstruction method in detail and presents some testing results for verification.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

In-Ung Song, Ho-Soon Yang, and Yun-Woo Lee "Full-aperture wavefront reconstruction method in quadri-wave lateral shearing interferometry (QWLSI)", Proc. SPIE 12672, Applied Optical Metrology V, 126720E (4 October 2023); https://doi.org/10.1117/12.2677170

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