Broadband optical monitoring of filters fabricated using molecular beam deposition

Shari Powell Fisher; Christopher C.H. Hale; Ian T. Muirhead; John Gordon H. Mathew; Robert J. Cornwell

doi:10.1117/12.20260

1 August 1990 Broadband optical monitoring of filters fabricated using molecular beam deposition

Shari Powell Fisher, Christopher C.H. Hale, Ian T. Muirhead, John Gordon H. Mathew, Robert J. Cornwell

Proceedings Volume 1266, In-Process Optical Measurements and Industrial Methods; (1990) https://doi.org/10.1117/12.20260
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

A broadband optical monitoring system to assist with the control of complex filter designs has been implemented on a newly installed Molecular Beam Deposition (MBD) facility which has been adapted for the growth of optical thin films. When depositing a multilayer structure like a Fabry- Perot etalon with very narrow features whose location depends upon a precise optical thickness the broadband optical monitor is an essential addition to process control. In addition to providing the capability to observe the growth of a sensitive optical feature the broadband optical monitor is used to calibrate other process control methods. This saves a considerable amount of processing time and demonstrates the cost effectiveness of such a system. By the judicious use of broadband optical monitoring a very high degree of control and efficiency is added to MBD processing of optical thin films. 1.

Citation Download Citation

Shari Powell Fisher, Christopher C.H. Hale, Ian T. Muirhead, John Gordon H. Mathew, and Robert J. Cornwell "Broadband optical monitoring of filters fabricated using molecular beam deposition", Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); https://doi.org/10.1117/12.20260

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available