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Performance characteristics for interferometers that measure surface topography include the ability to resolve closely spaced surface features, referred to as topographic spatial resolution. Within well-defined limits, scalar diffraction theory and classical Fourier optics provide a software model for prediction of the resolution and spatial frequency response for interference phase-based measurements of surface topography. Analytical solutions and adaptive sampling allow for rapid simulation of both the nominal linear transfer function and an estimate of intrinsic residual nonlinearities.
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P. J. de Groot, J. W. Kramer, T. P. Sutherland, "Modeling the topographic lateral resolution of interferometers," Proc. SPIE 12619, Modeling Aspects in Optical Metrology IX, 126190N (10 August 2023); https://doi.org/10.1117/12.2670939