Infrared and terahertz spectrally adaptive filters based on MEMS technologies

Mariusz Martyniuk; KKMB Dilusha Silva; Hemendra Kala; Michal Zawierta; Vincent P. Wallace; Konrad Walus; Lorenzo Faraone; Ilya V. Shadrivov

doi:10.1117/12.2658896

17 March 2023 Infrared and terahertz spectrally adaptive filters based on MEMS technologies

Mariusz Martyniuk, KKMB Dilusha Silva, Hemendra Kala, Michal Zawierta, Vincent P. Wallace, Konrad Walus, Lorenzo Faraone, Ilya V. Shadrivov

Author Affiliations +

Proceedings Volume 12425, Smart Photonic and Optoelectronic Integrated Circuits 2023; 124250H (2023) https://doi.org/10.1117/12.2658896
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Future remote imaging systems promise spectroscopic functionalities extending well beyond the visible wavelengths. This allows real-time spectral information to be gathered from multiple wavelength bands which is highly attractive for numerous remote sensing spectroscopy/imaging applications and aids target recognition. This paper briefly presents a micro-electromechanical systems (MEMS) based electrically tuneable adaptive filter technology developed for the technologically important infrared (IR) bands of the electromagnetic spectrum and reports on the progress towards extension to the significantly longer wavelength THz band. The demonstrated concepts focus on merging MEMSenabled dynamic modulation with the spectral sensitivity and selectivity of metamaterials, as well as on the possibility of adopting the rapidly evolving 3D printing technologies.

Conference Presentation

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Mariusz Martyniuk, KKMB Dilusha Silva, Hemendra Kala, Michal Zawierta, Vincent P. Wallace, Konrad Walus, Lorenzo Faraone, and Ilya V. Shadrivov "Infrared and terahertz spectrally adaptive filters based on MEMS technologies", Proc. SPIE 12425, Smart Photonic and Optoelectronic Integrated Circuits 2023, 124250H (17 March 2023); https://doi.org/10.1117/12.2658896

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