Research on partial null compensator with double-sided switching off-axial reflector

Tong Yang; Lei Yang; Jie Chen; Hongbo Xie

doi:10.1117/12.2638372

20 December 2022 Research on partial null compensator with double-sided switching off-axial reflector

Tong Yang, Lei Yang, Jie Chen, Hongbo Xie

Proceedings Volume 12315, Optical Design and Testing XII; 123150Z (2022) https://doi.org/10.1117/12.2638372
Event: SPIE/COS Photonics Asia, 2022, Online Only

Conference Poster

Abstract

Wavefront-based aspheric metrology techniques generally require a compensation lens to compensate for the primary aberrations. To expand the adaptability of the surface to be tested, this paper proposes and demonstrates a partial null compensator structure that can switch between the front and back mirror sides. The presented compensator comprises two sets of off-axis reflecting parts and a pre-compensation spheric lens in an integrated structure. An appropriate off-axis reflection combination mode can be selected for the range of the conic coefficient of the measured surface. With the simulation result, the presented compensator can adapt to a large-scale variation of the surface conic coefficient K from -10 to +10. The average residual wavefront aberration is no more than 1λ (PV) and 1/4 λ (RMS). The results show that the proposed structure can be efficiently applied to wavefront detection or interferometer for data post-processing.

Conference Presentation

Citation Download Citation

Tong Yang, Lei Yang, Jie Chen, and Hongbo Xie "Research on partial null compensator with double-sided switching off-axial reflector", Proc. SPIE 12315, Optical Design and Testing XII, 123150Z (20 December 2022); https://doi.org/10.1117/12.2638372

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