Solid state laser reliability, producibility, and maintenance issues for x-ray lithography applications

Joseph A. Abate

doi:10.1117/12.18391

1 April 1990 Solid state laser reliability, producibility, and maintenance issues for x-ray lithography applications

Joseph A. Abate

Proceedings Volume 1223, Solid State Lasers; (1990) https://doi.org/10.1117/12.18391
Event: OE/LASE '90, 1990, Los Angeles, CA, United States

Abstract

Laser-design and manufacturing considerations encountered in a micro-lithography application for a solid-state laser system are considered. A solid-state laser utilized in the application incorporates a zig-zag slab laser amplifier in a master oscillator/power amplifier staging configuration that can meet specifications for reliability and performance required for the semiconductor manufacturing industry. The laser staging makes extensive use of anamorphic beam-shaping and image-relaying to extract energy from the slab amplifier efficiently. The mechanical design of the laser structure employs multiple angularly multiplexed beams through a single-slab amplifier in order to minimize the total system volume. Relay spatial filters and maintenance issues are reviewed.

Citation Download Citation

Joseph A. Abate "Solid state laser reliability, producibility, and maintenance issues for x-ray lithography applications", Proc. SPIE 1223, Solid State Lasers, (1 April 1990); https://doi.org/10.1117/12.18391

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