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19 November 2021 Design of a piezoelectric pump with arch cantilever beam vibrator
Yong Zhang, Xiaoliang Wang, Liwei Chen, Yinghao Li, Haiyang Jiang, Qiaosheng Pan
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Proceedings Volume 12059, Tenth International Symposium on Precision Mechanical Measurements; 120590K (2021) https://doi.org/10.1117/12.2611703
Event: Tenth International Symposium on Precision Mechanical Measurements, 2021, Qingdao, China
Abstract
In this paper, a resonant piezoelectric pump is driven by a new type of piezoelectric vibrator is presented. A square piezoelectric vibrator with an arch cantilever beam structure is designed. Four arched cantilever beams are symmetrically distributed at the output end. Through the arch structure design, the stiffness of the cantilever beam is reduced under a certain size. The output displacement of the vibrator is improved and the output flow of the piezoelectric pump is improved. In this paper, the square piezoelectric vibrator is modeled and simulated. The experimental results show that the piezoelectric pump with square vibrator has good output performance. The flow rate reaches a peak of 49.8 ml/min at 505Hz when the driving voltage is 400 Vpp.
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Yong Zhang, Xiaoliang Wang, Liwei Chen, Yinghao Li, Haiyang Jiang, and Qiaosheng Pan "Design of a piezoelectric pump with arch cantilever beam vibrator", Proc. SPIE 12059, Tenth International Symposium on Precision Mechanical Measurements, 120590K (19 November 2021); https://doi.org/10.1117/12.2611703
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KEYWORDS
Structural design
Piezoelectric effects
Water
Piezoelectric drives
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