Operation concept and computer simulation of the wave process in a highly sensitive nanophotonic pressure microsensor

Igor O. Mikhaylov; Ekaterina I. Shtanko

doi:10.1117/12.2601530

15 December 2021 Operation concept and computer simulation of the wave process in a highly sensitive nanophotonic pressure microsensor

Igor O. Mikhaylov, Ekaterina I. Shtanko

Author Affiliations +

Proceedings Volume 11916, 27th International Symposium on Atmospheric and Ocean Optics, Atmospheric Physics; 119160H (2021) https://doi.org/10.1117/12.2601530
Event: 27th International Symposium on Atmospheric and Ocean Optics, Atmospheric Physics, 2021, Moscow, Russian Federation

Abstract

We propose the operating principle of a nanophotonic highly sensitive microsensor for a wide range of applications in technology, electronics, medicine as a sensor of pressure, temperature, vibration, blood pressure, etc. Computer simulation of the visible radiation interaction with the sensor nanostructure was carried out using the author's software product. The software is based on the modern mathematical apparatus of the vector finite element method.

Citation Download Citation

Igor O. Mikhaylov and Ekaterina I. Shtanko "Operation concept and computer simulation of the wave process in a highly sensitive nanophotonic pressure microsensor", Proc. SPIE 11916, 27th International Symposium on Atmospheric and Ocean Optics, Atmospheric Physics, 119160H (15 December 2021); https://doi.org/10.1117/12.2601530

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