Testing and verification of micro-electro-mechanical systems (MEMS) micromirrors for high-performance scientific applications

Natalie K. Anderson; Brian T. Fleming; Ambily Suresh; Dmitry Vorobiev; Adriana Diaz; Kevin France; Rebecca Schindhelm; Amanda Hendrix

doi:10.1117/12.2593755

30 August 2021 Testing and verification of micro-electro-mechanical systems (MEMS) micromirrors for high-performance scientific applications

Natalie K. Anderson, Brian T. Fleming, Ambily Suresh, Dmitry Vorobiev, Adriana Diaz, Kevin France, Rebecca Schindhelm, Amanda Hendrix

Author Affiliations +

Proceedings Volume 11821, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXII; 118210Z (2021) https://doi.org/10.1117/12.2593755
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

The Ultraviolet Micromirror Imaging Spectrograph (UMIS) will be the first UV integral field spectrograph (IFS) to use micro-electro-mechanical systems (MEMS) micromirrors, specifically in the form of two-axis analog micromirror arrays (AMAs). This novel application of AMAs will increase both the flexibility and spectral multiplexing efficiency of UMIS relative to currently available instruments. AMAs are already a widely used technology in telecommunications; this study investigated and proved their suitability for high performance scientific instrumentation. Suitability was determined through evaluation of the individual micromirror component on a custom optical bench set up. The following metrics were evaluated: temporal stability, thermal drift and stability, large-scale linear response and pointing precision. The tests demonstrated that under conditions of 20C - 40C the micromirror's temporal stability, thermal stability, large-scale linear response and pointing precision were stable within the required range. The micromirror's performance, as measured in this experiment, meets the requirements specified in UMIS design and indicates feasibility for future flight instruments. We present the experiment test setup and results in the context of the development of the UMIS testbed instrument.

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Natalie K. Anderson, Brian T. Fleming, Ambily Suresh, Dmitry Vorobiev, Adriana Diaz, Kevin France, Rebecca Schindhelm, and Amanda Hendrix "Testing and verification of micro-electro-mechanical systems (MEMS) micromirrors for high-performance scientific applications", Proc. SPIE 11821, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXII, 118210Z (30 August 2021); https://doi.org/10.1117/12.2593755

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