768×576 bit interline transfer EMCCD sensor

Qingfei Liu; Chunye Xu; Jie Xu; Weijing Chang; Fang Dai; Jianqiang Zhao

doi:10.1117/12.2586271

12 March 2021 768×576 bit interline transfer EMCCD sensor

Qingfei Liu, Chunye Xu, Jie Xu, Weijing Chang, Fang Dai, Jianqiang Zhao

Proceedings Volume 11763, Seventh Symposium on Novel Photoelectronic Detection Technology and Applications; 117631A (2021) https://doi.org/10.1117/12.2586271
Event: Seventh Symposium on Novel Photoelectronic Detection Technology and Application 2020, 2020, Kunming, China

Abstract

Inter-column transfer EMCCD uses N-type epitaxial P-well N-channel and four-layer polysilicon double-layer metal technology. It has 768×576 effective pixels and the pixel size is 13μm×13μm. The sensor has a global shutter, the maximum horizontal readout rate is 40MHz, and the dynamic range of the non-multiplier mode is 68dB.

Citation Download Citation

Qingfei Liu, Chunye Xu, Jie Xu, Weijing Chang, Fang Dai, and Jianqiang Zhao "768×576 bit interline transfer EMCCD sensor", Proc. SPIE 11763, Seventh Symposium on Novel Photoelectronic Detection Technology and Applications, 117631A (12 March 2021); https://doi.org/10.1117/12.2586271

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