Photonic crystal MEMS emitter for chemical gas sensing

Nanxi Li; Qin Chao; Zhonghua Gu; Shiwei Song; Yanyan Zhou; Shaonan Zheng; Linfang Xu; Yun Da Chua; Qingxin Zhang; Hong Cai; Daohua Zhang; Qi Jie Wang; Lennon Lee

doi:10.1117/12.2581358

5 March 2021 Photonic crystal MEMS emitter for chemical gas sensing

Nanxi Li, Qin Chao, Zhonghua Gu, Shiwei Song, Yanyan Zhou, Shaonan Zheng, Linfang Xu, Yun Da Chua, Qingxin Zhang, Hong Cai, Daohua Zhang, Qi Jie Wang, Lennon Lee

Author Affiliations +

Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 116970M (2021) https://doi.org/10.1117/12.2581358
Event: SPIE OPTO, 2021, Online Only

Abstract

A thermal emitter fabricated on complementary metal-oxide-semiconductor (CMOS)-compatible facilities is a key component for low-cost mid-infrared gas sensing. While conventional thermal emitters have broad spectrum and wide emission angle, which limit the sensing performance. In this work, a microelectromechanical system (MEMS)-based thermal emitter with photonic crystal has been designed and fabricated using CMOS-compatible technology. The photonic crystal enables the emission wavelength selectivity within mid-infrared regime. By engineering photonic crystal dimension, the emission enhancement wavelength can be matched to the fingerprint wavelength of chemical gas for efficient chemical gas sensing purpose.

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Citation Download Citation

Nanxi Li, Qin Chao, Zhonghua Gu, Shiwei Song, Yanyan Zhou, Shaonan Zheng, Linfang Xu, Yun Da Chua, Qingxin Zhang, Hong Cai, Daohua Zhang, Qi Jie Wang, and Lennon Lee "Photonic crystal MEMS emitter for chemical gas sensing", Proc. SPIE 11697, MOEMS and Miniaturized Systems XX, 116970M (5 March 2021); https://doi.org/10.1117/12.2581358

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