Optical Excitation Of Silicon Microresonators Using An Analogue Noise Modulated Source

L. M. Zhang; D. Uttamchandani; B. Culshaw

doi:10.1117/12.963023

13 February 1990 Optical Excitation Of Silicon Microresonators Using An Analogue Noise Modulated Source

L. M. Zhang, D. Uttamchandani, B. Culshaw

Proceedings Volume 1169, Fiber Optic and Laser Sensors VII; (1990) https://doi.org/10.1117/12.963023
Event: OE/FIBERS '89, 1989, Boston, United States

Abstract

An optical source, whose intensity is modulated by a band-limited analogue noise waveform, is used to generate transverse vibrations in a micromechanical silicon resonator. The vibrations are generated by a photothermal process in which optical energy is absorbed at the surface of the resonator thereby producing a thermal wave whose a.c. component causes a periodic expansion of the resonator. A pressure sensor incorporating a micromechanical resonator sensor has been fabricated, and the pressure sensitivity of this device, when driven by the band limited noise source, is reported.

Citation Download Citation

L. M. Zhang, D. Uttamchandani, and B. Culshaw "Optical Excitation Of Silicon Microresonators Using An Analogue Noise Modulated Source", Proc. SPIE 1169, Fiber Optic and Laser Sensors VII, (13 February 1990); https://doi.org/10.1117/12.963023

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