Accurate Calibration Of A Photo-Elastic Modulator In Polarization Modulation Ellipsometry

G. E. Jellison Jr.; F. A. Modine

doi:10.1117/12.962894

25 January 1990 Accurate Calibration Of A Photo-Elastic Modulator In Polarization Modulation Ellipsometry

G. E. Jellison Jr., F. A. Modine

Proceedings Volume 1166, Polarization Considerations for Optical Systems II; (1990) https://doi.org/10.1117/12.962894
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

An improved two-channel polarization modulation ellipsometer has recently been developed which has the capability of simultaneously measuring all three components of the reduced Stokes vector of light reflected from a sample surface. In contrast to the more conventional rotating analyzer ellipsometer, this instrument is very sensitive to A when A is close to 0° or 180°, and can measure the quadrant of iv and A. In order to maximize the accuracy and sensitivity of this instrument, new techniques have been developed to calibrate the photoelastic modulator. This paper presents techniques for determining (1) the drive voltage which determines the amplitude of the modulation as a function of wavelength, (2) the modulator static strain as a function of wavelength, and (3) the azimuthal angular orientation of the photoelastic modulator with respect to other optical elements in the system and to the sample itself. Once these calibrations have been performed, very accurate measurements of the ellipsometry parameters can be obtained.

Citation Download Citation

G. E. Jellison Jr. and F. A. Modine "Accurate Calibration Of A Photo-Elastic Modulator In Polarization Modulation Ellipsometry", Proc. SPIE 1166, Polarization Considerations for Optical Systems II, (25 January 1990); https://doi.org/10.1117/12.962894

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