Nano precision non-contact complex differential confocal method to detect large concave aspheric surface

Yan Du

doi:10.1117/12.2580373

5 November 2020 Nano precision non-contact complex differential confocal method to detect large concave aspheric surface

Yan Du

Author Affiliations +

Proceedings Volume 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing; 1156821 (2020) https://doi.org/10.1117/12.2580373
Event: Applied Optics and Photonics China (AOPC 2020), 2020, Beijing, China

Abstract

Spectral confocal displacement sensor is a kind of non-contact displacement sensor based on wavelength shift modulation. The principle of spectral confocal measurement transforms the displacement information into the wavelength information, and obtains the measured displacement through the spectrum measurement. Large aperture aspheric surface is the core component of optical system, and its measurement accuracy is directly related to the imaging accuracy of optical camera. The non-contact differential confocal method has the characteristics of non-contact and highprecision. Through the integration of dual frequency interferometer to accurately measure the distance and real-time compensate the measurement distance, the nano level high-precision surface measurement results are obtained, and the measurement accuracy of optical components is improved. In this paper, the non-contact differential confocal method is used to detect the concave aspheric surface with a diameter of 300 mm. Through error file compensation, the surface shape detection accuracy is improved to 12 nm rms, and the scanning detection accuracy is greatly improved to the interference detection accuracy, which meets the imaging requirements of optical system.

Citation Download Citation

Yan Du "Nano precision non-contact complex differential confocal method to detect large concave aspheric surface", Proc. SPIE 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing, 1156821 (5 November 2020); https://doi.org/10.1117/12.2580373

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