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For the existing ultraprecision fly-cutting machine tools, the cutting depth needs to be adjusted by the engineer manually, the cutting efficiency of Potassium Dihydrogen Phosphate (KDP) crystal is low and the error is large. In order to solve the problems of the existing ultraprecision fly-cutting machine tools, such as the need for engineers to manually adjust the cutting depth, low cutting efficiency and large error of KDP crystal. In this paper, a parallel high bandwidth nanometer feeding mechanism driven by piezoelectric ceramics with high resonance frequency and compact structure is designed for ultraprecision fly-cutting machine tools. The designed three-degree-of-freedom nanometer feeding platform can achieve precise deflection in θx and θy directions, and precise vertical movement in z-axis direction which can be used for micro-feeding and fine-tuning of KDP crystal. The static analysis and modal identification of the micro-feed platform are carried out to verify the static and dynamic characteristics of the designed device. In order to further verify the correctness of the finite element simulation, the experimental modal analysis of the micro-feed platform is carried out. The correctness of the finite element model is verified, and the natural frequency is high, which enables the micro-feed platform to obtain better dynamic response performance.
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