Paper
5 November 2020 A method for measuring the width of a focused laser beam in reflection
Author Affiliations +
Proceedings Volume 11562, AOPC 2020: Advanced Laser Technology and Application; 1156205 (2020) https://doi.org/10.1117/12.2574614
Event: Applied Optics and Photonics China (AOPC 2020), 2020, Beijing, China
Abstract
We present a simple method to measure the width of a focused laser beam, where we define the width as the radius of the beam at which the intensity is 1/e2 of its on-axis value. Our method is based on measuring the power of light reflected off a metallized microstructure patterned on a oxidized silicon substrate that is placed on a tri-dimensional positioner. As the boundary between the microstructure and the substrate is scanned across the beam, changes in reflected power provide a quantitative measurement of the width of the beam. Our method is a useful alternative to the knife edge technique if optical measurements in transmission are not possible.
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Jun Lu, Heng Lu, Antoine Reserbat-Plantey, Chen Yang, Ye Tian, Ying Yan, and Joel Moser "A method for measuring the width of a focused laser beam in reflection", Proc. SPIE 11562, AOPC 2020: Advanced Laser Technology and Application, 1156205 (5 November 2020); https://doi.org/10.1117/12.2574614
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KEYWORDS
Silicon

Gold

Actuators

Optical testing

Reflectivity

Objectives

Gaussian beams

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