Digital holographic microscope with a close set of two wavelengths

Hiroyuki Ishigaki; Tkahiro Mamiya; Ikuo Futamura; Yoshio Hayasaki

doi:10.1117/12.2574768

15 June 2020 Digital holographic microscope with a close set of two wavelengths

Hiroyuki Ishigaki, Tkahiro Mamiya, Ikuo Futamura, Yoshio Hayasaki

Proceedings Volume 11523, Optical Technology and Measurement for Industrial Applications 2020; 1152308 (2020) https://doi.org/10.1117/12.2574768
Event: SPIE Technologies and Applications of Structured Light, 2020, Yokohama, Japan

Abstract

New type of optical system for low-coherence digital holography with a close set of two wavelengths is proposed to measure a shape measurement of a curved surface object with a height of several-tens micrometer. The optical system simultaneously captures the object image with two wavelengths.

Citation Download Citation

Hiroyuki Ishigaki, Tkahiro Mamiya, Ikuo Futamura, and Yoshio Hayasaki "Digital holographic microscope with a close set of two wavelengths", Proc. SPIE 11523, Optical Technology and Measurement for Industrial Applications 2020, 1152308 (15 June 2020); https://doi.org/10.1117/12.2574768

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