X-ray interferometry technique using an x-ray microfocus laboratory source

M. Voevodina; S. Lyatun; A. Barannikov; I. Lyatun; I. Snigireva; A. Snigirev

doi:10.1117/12.2568499

21 August 2020 X-ray interferometry technique using an x-ray microfocus laboratory source

M. Voevodina, S. Lyatun, A. Barannikov, I. Lyatun, I. Snigireva, A. Snigirev

Proceedings Volume 11492, Advances in Metrology for X-Ray and EUV Optics IX; 114920L (2020) https://doi.org/10.1117/12.2568499
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

X-ray reflecto-interferometry technique based on compound refractive lenses using an x-ray laboratory source was proposed to study thin-film structures. The setup for this experiment is very simple: a focused x-ray beam is reflected from parallel flat surfaces, which creates an interference pattern in a wide angular range, therefore the interference pattern can be obtained in a single shot without the need to rotate the sample or the detector. The reflecto-interferograms for Si₃N₄ membranes were obtained using the MetalJet Excillium micro-focus laboratory source with GaKα emission line at 9.25 keV. The experimentally obtained film thickness is in good agreement with the declared characteristics.

Conference Presentation

Citation Download Citation

M. Voevodina, S. Lyatun, A. Barannikov, I. Lyatun, I. Snigireva, and A. Snigirev "X-ray interferometry technique using an x-ray microfocus laboratory source", Proc. SPIE 11492, Advances in Metrology for X-Ray and EUV Optics IX, 114920L (21 August 2020); https://doi.org/10.1117/12.2568499

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