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Mid-infrared (MIR) spectroscopy is a powerful technique for molecular sensing through identifying the vibrational fingerprints of analyte molecules. However, the sensing efficiency drops dramatically at the nanoscale due to the poor interaction between MIR light and nanometric molecules. Here we exploit the MIR magnetic dipole resonance in a single silicon Mie antenna to demonstrate enhanced molecular sensing. We show that an ultra-sensitive measurement of a sub-10-nm PMMA layer can be achieved by positioning the antennas at the anti-node of a standing wave, which enables light-matter interactions under enhanced resonance conditions. Our results provide a new approach towards high-sensitivity MIR molecular sensing based on a miniaturized photonic platform.
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Jie Fang, Kan Yao, Yuebing Zheng, "Enhanced mid-infrared molecular sensing with single silicon antennas," Proc. SPIE 11468, Enhanced Spectroscopies and Nanoimaging 2020, 114680V (20 August 2020); https://doi.org/10.1117/12.2567530