Study of dielectric properties of resistive thin-film coatings based on silicon nitride compositions

Andrey V. Starodubov; Alexey A. Serdobintsev; Ilya O. Kozhevnikov; Anton M. Pavlov; Viktor V. Galushka; Stanislav A. Makarkin

doi:10.1117/12.2564419

9 April 2020 Study of dielectric properties of resistive thin-film coatings based on silicon nitride compositions

Andrey V. Starodubov, Alexey A. Serdobintsev, Ilya O. Kozhevnikov, Anton M. Pavlov, Viktor V. Galushka, Stanislav A. Makarkin

Author Affiliations +

Proceedings Volume 11458, Saratov Fall Meeting 2019: Laser Physics, Photonic Technologies, and Molecular Modeling; 1145810 (2020) https://doi.org/10.1117/12.2564419
Event: Saratov Fall Meeting 2019: VII International Symposium on Optics and Biophotonics, 2019, Saratov, Russian Federation

Abstract

We consider the results of dielectric properties study in millimeter band of thin-films based on silicon nitride compositions. Silicon nitride thin-film coatings were deposited on a substrate by DC magnetron sputtering. As a substrate for silicon nitride thin-film coatings a quartz plate were utilized. The ratio of argon and nitrogen in the working gas mixture was chosen as the variable parameter to control the composition of the deposited thin-film coating. Several samples of silicon nitride thin-film coatings with about 1 um thickness were fabricated. Radiophysical and dielectric properties of the fabricated SiN-type thin-film coatings were studied in millimeter wave frequency band of 50-70 GHz (V-band) with help of free space measurement method. The obtained results have shown that by controlling the resistive thin-film coating composition one can only slightly vary the radiophysical and dielectric properties of coating in millimeter-band.

Citation Download Citation

Andrey V. Starodubov, Alexey A. Serdobintsev, Ilya O. Kozhevnikov, Anton M. Pavlov, Viktor V. Galushka, and Stanislav A. Makarkin "Study of dielectric properties of resistive thin-film coatings based on silicon nitride compositions", Proc. SPIE 11458, Saratov Fall Meeting 2019: Laser Physics, Photonic Technologies, and Molecular Modeling, 1145810 (9 April 2020); https://doi.org/10.1117/12.2564419

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE