The compensation of deformation measurement in large field of view based on digital speckle pattern interferometry

Fengqing Bao; Weijie Chen II; Qihan Zhao III; Shuangle Wu IV; Yonghong Wang

doi:10.1117/12.2547431

13 November 2019 The compensation of deformation measurement in large field of view based on digital speckle pattern interferometry

Fengqing Bao, Weijie Chen II, Qihan Zhao III, Shuangle Wu IV, Yonghong Wang

Author Affiliations +

Proceedings Volume 11343, Ninth International Symposium on Precision Mechanical Measurements; 113430G (2019) https://doi.org/10.1117/12.2547431
Event: International Symposium on Precision Mechanical Measurements 2019, 2019, Chongqing, China

Abstract

Digital speckle pattern interferometry (DSPI) is a high-precision measurement method for measuring the surface deformation of an object. Compared with other measurement techniques, it has the advantages of full-field measurement, real-time, non-contact, high precision and high sensitivity, which has made the technology widely concerned by the measurement community since its birth. However, the application calculation of most of the existing digital speckle interference is based on the paraxial and approximate vertical calculations, ignoring the large fluctuation range of the angle between the laser illumination direction and the CCD observation direction. It makes the measurement error of large field of view larger when the size of the object is large . Therefore, when measuring a large field of view, it is necessary to correct the existing measurement formula. This paper proposes a new method for applying digital speckle interference to large field of view measurement. Based on the basic principle of digital speckle interferometry, the corresponding compensation coefficient is obtained through mathematical relationship to compensate the measurement result of large field of view.

Citation Download Citation

Fengqing Bao, Weijie Chen II, Qihan Zhao III, Shuangle Wu IV, and Yonghong Wang "The compensation of deformation measurement in large field of view based on digital speckle pattern interferometry", Proc. SPIE 11343, Ninth International Symposium on Precision Mechanical Measurements, 113430G (13 November 2019); https://doi.org/10.1117/12.2547431

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