Block copolymer line roughness measurement via PSD: application to fingerprint samples

Aurélie Le Pennec; Jérôme Rêche; Patrick Quéméré; Guido Rademaker; Romain Jarnias; Charlotte Bouet; Célia Nicolet; Christophe Navarro; Maxime Argoud; Raluca Tiron

doi:10.1117/12.2551854

25 March 2020 Block copolymer line roughness measurement via PSD: application to fingerprint samples

Aurélie Le Pennec, Jérôme Rêche, Patrick Quéméré, Guido Rademaker, Romain Jarnias, Charlotte Bouet, Célia Nicolet, Christophe Navarro, Maxime Argoud, Raluca Tiron

Author Affiliations +

Proceedings Volume 11326, Advances in Patterning Materials and Processes XXXVII; 113261I (2020) https://doi.org/10.1117/12.2551854
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

This paper introduces line roughness characterization non-straight patterns made of block copolymers (fingerprint patterns). Line Width Roughness have been determined using Power Spectral Density based on a special edge detection developed at CEA-LETI to extract edges contours. We investigated several process parameters impact on LWR such as the degree of polymerization of different BCPs and the impact of UV irradiation on the roughness of the PS block.

Citation Download Citation

Aurélie Le Pennec, Jérôme Rêche, Patrick Quéméré, Guido Rademaker, Romain Jarnias, Charlotte Bouet, Célia Nicolet, Christophe Navarro, Maxime Argoud, and Raluca Tiron "Block copolymer line roughness measurement via PSD: application to fingerprint samples", Proc. SPIE 11326, Advances in Patterning Materials and Processes XXXVII, 113261I (25 March 2020); https://doi.org/10.1117/12.2551854

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