Roughness study on line and space patterning with chemo-epitaxy directed self-assembly

Hyo Seon Suh; Viktor Dudash; Gian Lorusso; Chris Mack

doi:10.1117/12.2552354

23 March 2020 Roughness study on line and space patterning with chemo-epitaxy directed self-assembly

Hyo Seon Suh, Viktor Dudash, Gian Lorusso, Chris Mack

Proceedings Volume 11326, Advances in Patterning Materials and Processes XXXVII; 113260X (2020) https://doi.org/10.1117/12.2552354
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

For the introduction of directed self-assembly (DSA) process into high volume manufacturing, the roughness of pattern is one of main check points. The focus of this study is to understand the origin of DSA roughness and to discuss the strategies to improve DSA-specific roughness. 3X DSA LiNe flow with PS-b-PMMA was used as a model case. Unbiased line edge roughness (LER) and linewidth roughness (LWR) were measured using power spectral density (PSD) analysis on CDSEM images. We found that low frequency LER is particularly sensitive to the assembly conditions. By optimizing material and process conditions, unbiased LWR was reduced by about 10%, while unbiased LER was reduced by about 15%.

Conference Presentation

Citation Download Citation

Hyo Seon Suh, Viktor Dudash, Gian Lorusso, and Chris Mack "Roughness study on line and space patterning with chemo-epitaxy directed self-assembly", Proc. SPIE 11326, Advances in Patterning Materials and Processes XXXVII, 113260X (23 March 2020); https://doi.org/10.1117/12.2552354

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