3D analysis of high-aspect ratio features in 3D-NAND

Jens Timo Neumann; Dmitry Klochkov; Thomas Korb; Sheetal Gupta; Amir Avishai; Ramani Pichumani; Keumsil Lee; Alex Buxbaum; Eugen Foca

doi:10.1117/12.2552006

20 March 2020 3D analysis of high-aspect ratio features in 3D-NAND

Jens Timo Neumann, Dmitry Klochkov, Thomas Korb, Sheetal Gupta, Amir Avishai, Ramani Pichumani, Keumsil Lee, Alex Buxbaum, Eugen Foca

Author Affiliations +

Proceedings Volume 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV; 113250M (2020) https://doi.org/10.1117/12.2552006
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

We demonstrate the application of 3D tomography by FIB-SEM to analyze channel holes in 3D-NAND. We automatically analyze the 3D channel profiles for size, shape, and placement from the reconstructed full 3D volume. As the data contains thousands of holes, and each hole is sampled with a resolution of a few nanometer in 3D, this method provides a vast amount of data. We analyze individual holes as well as a full population of holes, from a solid statistical basis. Such information is beneficial in monitoring and controlling the etch process of the HAR channel holes in 3DNAND fabrication.

Conference Presentation

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Jens Timo Neumann, Dmitry Klochkov, Thomas Korb, Sheetal Gupta, Amir Avishai, Ramani Pichumani, Keumsil Lee, Alex Buxbaum, and Eugen Foca "3D analysis of high-aspect ratio features in 3D-NAND", Proc. SPIE 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV, 113250M (20 March 2020); https://doi.org/10.1117/12.2552006

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