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10 March 2020 Strongly-coupled, high-quality plasmonic nanoantennas fabricated using a sketch and peel fabrication technique (Conference Presentation)
Martin Silies, Moritz Gittinger, Katja Hoeflich, Vladimir Smirnov, Heiko Kollmann, Christoph Lienau
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Proceedings Volume 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII; 112920A (2020) https://doi.org/10.1117/12.2545889
Event: SPIE OPTO, 2020, San Francisco, California, United States
Abstract
Helium and Gallium-ion beam milling in combination with a fast and reliable Sketch-and-peel technique is used to fabricate pairs of gold nanoantennas with a superior quality factor and with gap distances down to 6nm. The high fabrication quality compared to standard ion beam milling is proven by polarization-resolved dark-field spectro-microscopy of isolated nanoantennas pairs. We observe a strong coupling of the two antenna arms for both fabrication techniques, however with an outstanding quality factor for the Sketch-and-peel-produced antennas. The presented fabrication technique can pave the way to the production of plasmonic nanostructures on large spatial scales with high milling accuracy.
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Martin Silies, Moritz Gittinger, Katja Hoeflich, Vladimir Smirnov, Heiko Kollmann, and Christoph Lienau "Strongly-coupled, high-quality plasmonic nanoantennas fabricated using a sketch and peel fabrication technique (Conference Presentation)", Proc. SPIE 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII, 112920A (10 March 2020); https://doi.org/10.1117/12.2545889
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KEYWORDS
Fabrication
Nanoantennas
Nanolithography
Plasmonics
Antennas
Electromagnetic radiation
Finite-difference time-domain method
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