Novel piezo motor for a high precision motion axis

Roman Yasinov; Gal Peled; Alan Feinstein; Nir Karasikov

doi:10.1117/12.2546283

2 March 2020 Novel piezo motor for a high precision motion axis

Roman Yasinov, Gal Peled, Alan Feinstein, Nir Karasikov

Proceedings Volume 11287, Photonic Instrumentation Engineering VII; 112870S (2020) https://doi.org/10.1117/12.2546283
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

The Semiconductor industry’s evolution towards 7, 5 and 3 nm nodes at higher throughputs, poses a challenge on motion systems. Motion systems are expected to yield a sub nanometer accuracy and velocity higher than 500 mm/sec, fast move and settle, low drift and minimal thermal load on the system, especially in vacuum. Ultrasonic piezo-motors have many benefits to fulfill these requirements. This paper reports on the development of a novel piezo motor, characterized by high velocity, high stiffness, low thermal load and ultra-high precision. The use of six motors, in parallel, on a single motion axis can yield a 200N of thrust force and a 60 N/μm stiffness. The motor is driven by a new driver having a noise equivalent position of better than 60 pico-meter. This paper reviews the motor design considerations, performance capabilities in stiffness, duty cycle, sub-nanometer convergence and ultra-low drift. Robustness is demonstrated by long term run. An example of a motion axis driven by the novel motor is shown.

Conference Presentation

Citation Download Citation

Roman Yasinov, Gal Peled, Alan Feinstein, and Nir Karasikov "Novel piezo motor for a high precision motion axis", Proc. SPIE 11287, Photonic Instrumentation Engineering VII, 112870S (2 March 2020); https://doi.org/10.1117/12.2546283

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