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9 March 2020 High-efficiency laser milling by bursts of ultrashort (fs-ps) light pulses (Conference Presentation)
Andrius Žemaitis, Paulius Gečys, Gediminas Račiukaitis, Mindaugas Gedvilas
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Proceedings Volume 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV; 112670U (2020) https://doi.org/10.1117/12.2551051
Event: SPIE LASE, 2020, San Francisco, California, United States
Abstract
Ultrashort laser pulses are already widely used in material processing due to high flexibility and precision. However, competition in industrial applications demands growth of processing efficiency every year. In our previous works, the laser ablation efficiency versus various conventional processing parameters like laser fluence, beam scanning speed, pulse repetition rate and hatch distance was studied and beam-size-optimization was introduced. Also burst mode processing was applied, since it attracted a lot of attention by scientific and technological communities. The purpose of our current work was to investigate the real advantage of the burst regime by comparing the beam-size-optimized single-pulse regime with the beam-size-optimized multiple-pulse burst regime, which was never previously demonstrated. The optimization was done by increasing the spot size to find the maximum ablation efficiency for various pulse numbers per burst and various pulse durations.
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Andrius Žemaitis, Paulius Gečys, Gediminas Račiukaitis, and Mindaugas Gedvilas "High-efficiency laser milling by bursts of ultrashort (fs-ps) light pulses (Conference Presentation)", Proc. SPIE 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV, 112670U (9 March 2020); https://doi.org/10.1117/12.2551051
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KEYWORDS
Laser ablation
Picosecond phenomena
Pulsed laser operation
Copper
Femtosecond phenomena
Laser processing
Materials processing
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