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12 July 2019 Progress in thin film coating on space IR detectors
L. Macé, E. H. Oubensaid, F. Pradal, R. Lhuillier, H. Leplan, O. Gauthier-Lafaye, A. Monmayrant
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Proceedings Volume 11180, International Conference on Space Optics — ICSO 2018; 111803G (2019) https://doi.org/10.1117/12.2536043
Event: International Conference on Space Optics - ICSO 2018, 2018, Chania, Greece
Abstract
Improvements as well as new functionalities can be implemented in IR sensors by depositing a stack of thin film layers on top their surface. For this purpose, Safran Reosc has developed and qualified various processes, from conventional deposition methods to planar structuration approaches. In this article, the usefulness of thin film AR coatings are addressed and the latest results obtained on projects like Sentinel-5 and Microcarb IR focal planes are presented and discussed. We also address our progress in pixelization of the coating by structuration of these optical layers. Eventually, the most recent developments of sub-lambda photonic filtering structures are discussed.
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L. Macé, E. H. Oubensaid, F. Pradal, R. Lhuillier, H. Leplan, O. Gauthier-Lafaye, and A. Monmayrant "Progress in thin film coating on space IR detectors", Proc. SPIE 11180, International Conference on Space Optics — ICSO 2018, 111803G (12 July 2019); https://doi.org/10.1117/12.2536043
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KEYWORDS
Optical filters
Coating
Sensors
Multilayers
Infrared sensors
Antireflective coatings
Etching
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