Large Scale Fabrication Of Lightweight Si/SiC LIDAR Mirrors

Jitendra Singh Goela; Raymond L. Taylor

doi:10.1117/12.960943

26 October 1989 Large Scale Fabrication Of Lightweight Si/SiC LIDAR Mirrors

Jitendra Singh Goela, Raymond L. Taylor

Proceedings Volume 1118, Space Optical Materials and Space Qualification of Optics; (1989) https://doi.org/10.1117/12.960943
Event: SPIE 1989 Technical Symposium on Aerospace Sensing, 1989, Orlando, FL, United States

Abstract

Small models (7.5-cm dia.) of lightweight Si/SiC mirrors have been fabricated via a scalable chemical vapor deposition process. These mirrors consist of a low f-number (f/1.6), concave faceplate of SiC coated with CVD Si, and a lightweight back-up structure made of SiC. The lightweight structure consists of an outer hexagonal cell with six triangular inner cells. The complete lightweight mirror substrate was fabricated directly in a CVD chamber, and no bonding agent was used to attach the SiC back-up structure to the faceplate. The Si/SiC mirrors were polished to a figure of 1/5th of a wave and a surface finish of 10 Å RMS. The CVD mirror fabrication process was scaled from a small horizontal research furnace to a vertical pilot-plant size CVD reactor. Silicon carbide depositions were successfully performed to fabricate 40-cm-diameter f/1.6 concave mirror faceplates. Currently, experiments are under way to fabricate a SiC lightweight structure on the backside of the SiC faceplate. Experimental results and important issues concerning the large scale fabrication of mirrors via CVD are discussed.

Citation Download Citation

Jitendra Singh Goela and Raymond L. Taylor "Large Scale Fabrication Of Lightweight Si/SiC LIDAR Mirrors", Proc. SPIE 1118, Space Optical Materials and Space Qualification of Optics, (26 October 1989); https://doi.org/10.1117/12.960943

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available